Analysis and correction of drift-induced distortions on quantitative SPM surface roughness evaluations

Tingting Luo; Yuhang Chen; Wenhao Huang; Sitian Gao

doi:10.1117/12.2072892

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21 August 2014 Analysis and correction of drift-induced distortions on quantitative SPM surface roughness evaluations

Tingting Luo, Yuhang Chen, Wenhao Huang, Sitian Gao

Proceedings Volume 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 928312 (2014) https://doi.org/10.1117/12.2072892
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

The surface roughness at micro/nano scale is essential in the quality of the optical surface. In quantitative characterization of the roughness surfaces, SPM instruments are widely used due to its ultra-high resolution and powerful performance. However, drift inevitably exist in SPM measurement and it can distort the quantitative characterization. To evaluate the SPM measurements of roughness surface more accurately, both the influence discipline of drift on random surface measurement and the development of effective correction methods need to be studied. Toward this purpose, SPM imaging of roughness surface with the presence of drift is simulated and influence discipline to roughness surface parameters was analyzed. Besides, counter-scanning correction method based on identification and matching of feature points was used to correct the roughness surface. Both simulation and experiment verified the effectiveness of the employed method. Experimental verification was conducted using roughness reference specimen with specially designed and processed structural parameters.

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Tingting Luo, Yuhang Chen, Wenhao Huang, and Sitian Gao "Analysis and correction of drift-induced distortions on quantitative SPM surface roughness evaluations", Proc. SPIE 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 928312 (21 August 2014); https://doi.org/10.1117/12.2072892

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