16 December 2014 On accuracy of holographic shape measurement method with spherical wave illumination
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Proceedings Volume 9290, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2014; 92900P (2014) https://doi.org/10.1117/12.2075807
Event: Symposium on Photonics Applications in Astronomy, Communications, Industry and High-Energy Physics Experiments, 2014, Warsaw, Poland
Abstract
This paper presents the study on the accuracy of topography measurement of high numerical aperture focusing microobjects in digital holographic microscope setup. The system works in reflective configuration with spherical wave illumination. For numerical reconstruction of topography of high NA focusing microobjects we are using two algorithms: Thin Element Approximation (TEA) and Spherical Local Ray Approximation (SLRA). In this paper we show comparison of the accuracy of topography reconstruction results using these algorithms. We show superiority of SLRA method. However, to obtain accurate results two experimental conditions have to be determined: the position of point source (PS) and imaging reference plane (IRP).Therefore we simulate the effect of point source (PS) and imaging reference plane (IRP) position on the accuracy of shape calculation. Moreover we evaluate accuracy of determination of location of PS and IRP and finally present measurement result of microlens object.
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Marta Mikuła, Marta Mikuła, Tomasz Kozacki, Tomasz Kozacki, Julianna Kostencka, Julianna Kostencka, Kamil Liżewski, Kamil Liżewski, Michał Józwik, Michał Józwik, } "On accuracy of holographic shape measurement method with spherical wave illumination", Proc. SPIE 9290, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2014, 92900P (16 December 2014); doi: 10.1117/12.2075807; https://doi.org/10.1117/12.2075807
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