3 December 2014 The height error range of multilayer diffractive optical element with consideration of polychromatic integral diffraction efficiency
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Abstract
According to the expression of the phase delay and diffraction efficiency of the diffractive optical elements(DOEs), the expression of diffraction efficiency of multilayer diffractive optical element(MLDOEs) with the height error in fabrication process was described in this paper. We selected the PC and PMMA used usually at optics as substrate material of MLDOEs, and analyze the height error range of multilayer diffractive optical element with consideration of polychromatic integral diffraction efficiency basing on the mathematical analysis model of the relationship between height error and diffraction efficiency for MLDOEs. The range of height error the diffraction efficiency of MLDOEs was given. This model can be used to guide the design and fabrication process of hybrid diffraction refractive optical system for optical engineer.
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Long Gao, Long Gao, Changxi Xue, Changxi Xue, Hongfang Yang, Hongfang Yang, Xin Nie, Xin Nie, } "The height error range of multilayer diffractive optical element with consideration of polychromatic integral diffraction efficiency", Proc. SPIE 9297, International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors, 92970K (3 December 2014); doi: 10.1117/12.2070818; https://doi.org/10.1117/12.2070818
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