3 December 2014 Analyses of multiple surfaces transform interferometry in parallel plate measurement
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Abstract
Multiple surfaces transform interferometery is a preferred technology for surface profile and index homogeneity measurement using a Fourier based analysis method combined with phase-shifting interferometer. As a four-surface cavity for example, the surface form and index inhomogeneity of the parallel plate are deduced by extracting the information from the corresponding interference frequency. The errors of surface form and index homogeneity are simultaneously simulated and analyzed with different sampling buckets. The results show the feasibility and high precision of this approach compared with traditional methods.
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Lin Zhang, Lin Zhang, Huan Ren, Huan Ren, Yi Yang, Yi Yang, Yong Liu, Yong Liu, Zhendong Shi, Zhendong Shi, Quan Yuan, Quan Yuan, Hongzhen Jiang, Hongzhen Jiang, } "Analyses of multiple surfaces transform interferometry in parallel plate measurement ", Proc. SPIE 9297, International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors, 92970Y (3 December 2014); doi: 10.1117/12.2071877; https://doi.org/10.1117/12.2071877
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