3 December 2014 Principal and error analysis of mirror symmetry method in three-flat test
Author Affiliations +
Three-flat test can separate the reference surface error from the test part surface in the surface measurement by interferometry. The solution based on mirror symmetry of three-flat test is compact and highly accurate. In practice, the error will be introduced when the position of three flats are misalignment or the relative rotation angle are not accurate. The influence of rotation angle error are simulated and discussed. Then the experiment was carried out on three reference flats and the flat surface profiles were derived by mirror symmetry method. The experiment results show good agreement and the difference is in a nanometer level.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yong Liu, Yong Liu, Xu Liu, Xu Liu, Hongzhen Jiang, Hongzhen Jiang, Yuhang He, Yuhang He, Huan Ren, Huan Ren, Yi Yang, Yi Yang, Lin Zhang, Lin Zhang, Zhendong Shi, Zhendong Shi, Quan Yuan, Quan Yuan, "Principal and error analysis of mirror symmetry method in three-flat test ", Proc. SPIE 9297, International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors, 929710 (3 December 2014); doi: 10.1117/12.2071921; https://doi.org/10.1117/12.2071921

Back to Top