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3 December 2014 A high sensitivity humidity sensor based on micro-ring resonator with three coupling points
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Abstract
A novel high sensitivity humidity sensor based on micro-ring resonator with three coupling points (MRRTCP) is reported. Since the dielectric constant of Polyimide is highly sensible to the relative humidity of the environment, we choose the Polyimide (PI) as the moisture material. The effective refractive index of the sensing part of the sensor changes as the relative humidity of the environment changes, this leading to an obvious shift of the output spectrum. The sensing range of the relative humidity sensor is 0~100%RH, and the sensitivity is 0.0017μm/%RH, and the structure is relatively simple and could be used in micro-scale humidity sensing.
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Shi-liang Guo, Wen-juan Wang, and Chun-hai Hu "A high sensitivity humidity sensor based on micro-ring resonator with three coupling points", Proc. SPIE 9297, International Symposium on Optoelectronic Technology and Application 2014: Laser and Optical Measurement Technology; and Fiber Optic Sensors, 92972P (3 December 2014); https://doi.org/10.1117/12.2071075
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