18 November 2014 Nano-scale finishing of off-axis aspheric mirror by ion beam figuring
Author Affiliations +
Abstract
The high precision off-axis asphere mirrors are quite usefull in the modern sapce optical system.in this paper, the ion beam figuring is researched to accomplish the final surface accuracy. Firstly, The IBF machine we used is introduced simplely. The correction method for the distortion in off-axis mirror interference measurement is studied. Beacasue of the curve shape of the off-axis mirror, the changing of the removal function was analyzed simply. In order to testify the reaserch, a 1100mm×800mm off-axis aspheric mirror is finished by ion beam figuring. After 2 times polishing, the surface error was corrected to RMS 9nm in full aperture and achieved 6.3nm in sub- aperture.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wei-Jie Deng, Li-gong Zheng, "Nano-scale finishing of off-axis aspheric mirror by ion beam figuring", Proc. SPIE 9298, International Symposium on Optoelectronic Technology and Application 2014: Imaging Spectroscopy; and Telescopes and Large Optics, 92981C (18 November 2014); doi: 10.1117/12.2071418; https://doi.org/10.1117/12.2071418
PROCEEDINGS
6 PAGES


SHARE
RELATED CONTENT

Manufacturing and testing large SiC mirrors in an efficient way
Proceedings of SPIE (September 24 2015)
Polishing an off-axis aspheric mirror by ion beam figuring
Proceedings of SPIE (October 28 2016)
The advancement of the high precision stress polishing
Proceedings of SPIE (October 28 2016)
Progress in ion figuring large optics
Proceedings of SPIE (July 14 1995)
Ion beam figuring system in NUDT
Proceedings of SPIE (November 14 2007)

Back to Top