18 November 2014 Nano-scale finishing of off-axis aspheric mirror by ion beam figuring
Author Affiliations +
The high precision off-axis asphere mirrors are quite usefull in the modern sapce optical system.in this paper, the ion beam figuring is researched to accomplish the final surface accuracy. Firstly, The IBF machine we used is introduced simplely. The correction method for the distortion in off-axis mirror interference measurement is studied. Beacasue of the curve shape of the off-axis mirror, the changing of the removal function was analyzed simply. In order to testify the reaserch, a 1100mm×800mm off-axis aspheric mirror is finished by ion beam figuring. After 2 times polishing, the surface error was corrected to RMS 9nm in full aperture and achieved 6.3nm in sub- aperture.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wei-Jie Deng, Wei-Jie Deng, Li-gong Zheng, Li-gong Zheng, "Nano-scale finishing of off-axis aspheric mirror by ion beam figuring", Proc. SPIE 9298, International Symposium on Optoelectronic Technology and Application 2014: Imaging Spectroscopy; and Telescopes and Large Optics, 92981C (18 November 2014); doi: 10.1117/12.2071418; https://doi.org/10.1117/12.2071418


Manufacturing and testing large SiC mirrors in an efficient way
Proceedings of SPIE (September 23 2015)
Polishing an off-axis aspheric mirror by ion beam figuring
Proceedings of SPIE (October 27 2016)
Progress in ion figuring large optics
Proceedings of SPIE (July 13 1995)
Ion beam figuring system in NUDT
Proceedings of SPIE (November 13 2007)
Large optics ion figuring
Proceedings of SPIE (September 05 1999)

Back to Top