18 November 2014 Tolerance analysis of a super-resolution optical system
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Abstract
Pupil filtering is a widely used super-resolving technique. This technique utilizes one or more diffractive superresolution elements (DSEs) to break the diffraction limit. This paper focused on the tolerance analysis of DSEs. Although the analysis in this paper was based on a specific super-resolution system, it was sufficient to demonstrate our efforts and make some conclusions. Generally, two types of tolerances have been taken into consideration. One is DSE's position tolerance. The other is the tolerance of DSE's phase transmittance. With the presented method, it is able to evaluate the influence of DSE tolerances on a super-resolution optical system, and thus to guide practical fabrication.
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Weiyi Zha, Weiyi Zha, Jun Chang, Jun Chang, Weilin Chen, Weilin Chen, Haibo Yang, Haibo Yang, Xiusheng Yan, Xiusheng Yan, } "Tolerance analysis of a super-resolution optical system", Proc. SPIE 9298, International Symposium on Optoelectronic Technology and Application 2014: Imaging Spectroscopy; and Telescopes and Large Optics, 92981V (18 November 2014); doi: 10.1117/12.2072679; https://doi.org/10.1117/12.2072679
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