The special designed 3-DOF direct-drive air bearing decoupling stage has the advantages of high repeatability and free coupling error between different axes. And it is suitable for wafer scanning application. However, due to the flexible joints between the orthogonal axes, the relatively low frequency resonant modes limit the bandwidth of closed loop tracking control. This presentation shows how we obtain the frequency response model of the decouple stage accurately and safely with closed-loop identification approach, using dSPACE modular control systems, and how we use the model to achieve high-speed tracking control using model-based feedforward / feedback composite control.
For safety purposes, the electrical portion of decoupled stage is carefully designed with appropriate limit
sensors and emergency safety switch. The decoupled stage is controlled by DS1005 modular control system, which gives ultra-high control loop updating rate at 100us. With such high profile controller, we model the frequency response of 3-DOF system using sequential closed-loop relay feedback. From here, the model of rigid body mode and flexible modes are identified. The identified model provides a guideline for trajectory design and closed-loop PID plus feedforward controller design for synchronization of dual-drive X-axis motion. Although the trial on design of decoupling controller has been proposed, internal stability of such decoupling control schemes remains a research issue for our future work.