Environmental sensing with optical fiber sensors processed with focused ion beam and atomic layer deposition

Raquel Flores; Ricardo Janeiro; Marcus Dahlem; Jaime Viegas

doi:10.1117/12.2080744

5 March 2015 Environmental sensing with optical fiber sensors processed with focused ion beam and atomic layer deposition

Raquel Flores, Ricardo Janeiro, Marcus Dahlem, Jaime Viegas

Author Affiliations +

Proceedings Volume 9320, Microfluidics, BioMEMS, and Medical Microsystems XIII; 932009 (2015) https://doi.org/10.1117/12.2080744
Event: SPIE BiOS, 2015, San Francisco, California, United States

Abstract

We report an optical fiber chemical sensor based on a focused ion beam processed optical fiber. The demonstrated sensor is based on a cavity formed onto a standard 1550 nm single-mode fiber by either chemical etching, focused ion beam milling (FIB) or femtosecond laser ablation, on which side channels are drilled by either ion beam milling or femtosecond laser irradiation. The encapsulation of the cavity is achieved by optimized fusion splicing onto a standard single or multimode fiber. The empty cavity can be used as semi-curved Fabry-Pérot resonator for gas or liquid sensing. Increased reflectivity of the formed cavity mirrors can be achieved with atomic layer deposition (ALD) of alternating metal oxides. For chemical selective optical sensors, we demonstrate the same FIB-formed cavity concept, but filled with different materials, such as polydimethylsiloxane (PDMS), poly(methyl methacrylate) (PMMA) which show selective swelling when immersed in different solvents. Finally, a reducing agent sensor based on a FIB formed cavity partially sealed by fusion splicing and coated with a thin ZnO layer by ALD is presented and the results discussed. Sensor interrogation is achieved with spectral or multi-channel intensity measurements.

Citation Download Citation

Raquel Flores, Ricardo Janeiro, Marcus Dahlem, and Jaime Viegas "Environmental sensing with optical fiber sensors processed with focused ion beam and atomic layer deposition", Proc. SPIE 9320, Microfluidics, BioMEMS, and Medical Microsystems XIII, 932009 (5 March 2015); https://doi.org/10.1117/12.2080744

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