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3 March 2015 Femtosecond laser direct writing of high-Q microresonators in glass and crystals
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We report on fabrication of microresonators of high quality (high-Q) factors in both glass and crystalline materials by femtosecond laser 3D micromachining. Based on this novel approach, we obtained high-Q microresonators of non-in-plane geometries in glass materials such as fused silica and Nd: glass and demonstrated lasing at a pump power as low as 69 microwatts. We also fabricated on-chip microresonators of sub-100 μm diameters in crystalline materials including calcium fluoride and lithium niobate, and demonstrated efficient second harmonic generation using the high-Q lithium niobate microresonator. Furthermore, femtosecond laser 3D micromachining allows direct integration of the microresonators with other functional microcomponents, such as a microfluidic mixer and a microheater, leading to compact microdevices with enhanced functionalities. Our technique opens new avenues for fabricating high-Q microresonators with either 2D or 3D geometries on various types of dielectric materials.
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Jintian Lin, Yingxin Xu, Jiangxin Song, Jialei Tang, Zhiwei Fang, Min Wang, Wei Fang, and Ya Cheng "Femtosecond laser direct writing of high-Q microresonators in glass and crystals", Proc. SPIE 9343, Laser Resonators, Microresonators, and Beam Control XVII, 934310 (3 March 2015);

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