You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
3 March 2015Femtosecond laser direct writing of high-Q microresonators in glass and crystals
We report on fabrication of microresonators of high quality (high-Q) factors in both glass and crystalline materials by femtosecond laser 3D micromachining. Based on this novel approach, we obtained high-Q microresonators of non-in-plane geometries in glass materials such as fused silica and Nd: glass and demonstrated lasing at a pump power as low as 69 microwatts. We also fabricated on-chip microresonators of sub-100 μm diameters in crystalline materials including calcium fluoride and lithium niobate, and demonstrated efficient second harmonic generation using the high-Q lithium niobate microresonator. Furthermore, femtosecond laser 3D micromachining allows direct integration of the microresonators with other functional microcomponents, such as a microfluidic mixer and a microheater, leading to compact microdevices with enhanced functionalities. Our technique opens new avenues for fabricating high-Q microresonators with either 2D or 3D geometries on various types of dielectric materials.
The alert did not successfully save. Please try again later.
Jintian Lin, Yingxin Xu, Jiangxin Song, Jialei Tang, Zhiwei Fang, Min Wang, Wei Fang, Ya Cheng, "Femtosecond laser direct writing of high-Q microresonators in glass and crystals," Proc. SPIE 9343, Laser Resonators, Microresonators, and Beam Control XVII, 934310 (3 March 2015);