3 March 2015 Femtosecond laser direct writing of high-Q microresonators in glass and crystals
Author Affiliations +
We report on fabrication of microresonators of high quality (high-Q) factors in both glass and crystalline materials by femtosecond laser 3D micromachining. Based on this novel approach, we obtained high-Q microresonators of non-in-plane geometries in glass materials such as fused silica and Nd: glass and demonstrated lasing at a pump power as low as 69 microwatts. We also fabricated on-chip microresonators of sub-100 μm diameters in crystalline materials including calcium fluoride and lithium niobate, and demonstrated efficient second harmonic generation using the high-Q lithium niobate microresonator. Furthermore, femtosecond laser 3D micromachining allows direct integration of the microresonators with other functional microcomponents, such as a microfluidic mixer and a microheater, leading to compact microdevices with enhanced functionalities. Our technique opens new avenues for fabricating high-Q microresonators with either 2D or 3D geometries on various types of dielectric materials.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jintian Lin, Jintian Lin, Yingxin Xu, Yingxin Xu, Jiangxin Song, Jiangxin Song, Jialei Tang, Jialei Tang, Zhiwei Fang, Zhiwei Fang, Min Wang, Min Wang, Wei Fang, Wei Fang, Ya Cheng, Ya Cheng, "Femtosecond laser direct writing of high-Q microresonators in glass and crystals", Proc. SPIE 9343, Laser Resonators, Microresonators, and Beam Control XVII, 934310 (3 March 2015); doi: 10.1117/12.2071737; https://doi.org/10.1117/12.2071737

Back to Top