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Author(s), “Title of Paper,” in Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, edited by Stephan Roth, Yoshiki Nakata, Beat Neuenschwander, Xianfan Xu, Proceedings of SPIE Vol. 9350 (SPIE, Bellingham, WA, 2015) Article CID Number.

ISSN: 0277-786X

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Authors

Numbers in the index correspond to the last two digits of the six-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first four digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B…0Z, followed by 10-1Z, 20-2Z, etc.

Abdou Ahmed, M., 12

Abdulfattah, Ali, 0B

Ahmed, Farid, 0C

Akitsu, Tetsuya, 1E

Bellouard, Yves, 0G

Berger, Sascha, 0B

Bodea, Marius, 1J

Breunig, H. G., 18

Chen, Chia-Chuan, 19

Chen, In-Gann, 19

Chen, K., 1K

Chen, Kuan-Ming, 1F

Chen, You-jyun, 19

Cheng, Chung-Wei, 19

Cheng, Ya, 0G

Chung, Ming-Han, 1F

Domke, Matthias, 1J

Ducros, N., 14

Egle, Bernadette, 1J

Fasching, Gernot, 1J

Freitag, C., 12

Fukuda, Naoaki, 13, 1A

Gaponov, D., 14

Ge, Wangyao, 07

Gečys, P., 0S, 14

George, D., 1K

Graf, T., 12

Harada, K., 0X

Hideur, A., 14

Higashihata, M., 0X, 1L

Hosokawa, Yoichiroh, 1C

Huang, Jung-Chun, 19

Huang, Min, 0G

Iino, Takanori, 1C

Ikenoue, H., 1L

Indrišiūnas, Simonas, 03

Jaeggi, B., 0U, 16

Jitsuno, Takahisa, 1E

Jun, Martin B. G., 0C

Kapnopoulos, C., 0Q

Karnakis, D. M., 0Q

Kearsley, A. J., 0Q

König, K., 18

Kramer, Th., 0U

Kurita, Torataro, 13

Kurosaki, Ryozo, 0I

Laskarakis, A., 0Q

Lauer, B., 0U

Lavoute, L., 14

Lee, Chih-Kung, 1F

Leinenbach, F., 18

Liao, Yang, 0G

Lin, Cen-Ying, 19

Lin, Y., 1K

Logothetidis, S., 0Q

Löscher, A., 12

Lowell, D., 1K

Lutkenhaus, J., 1K

Markauskas, E., 0S

Maruyama, Akihiro, 1C

Masuno, Shinichiro, 0V

Matsuoka, Fumihiro, 0V

McCormick, Ryan D., 07

Mekeridis, E. 0Q

Midorikawa, Katsumi, 0F

Mingareev, Ilya, 0B

Miura, Kiyotaka, 13, 1A

Moorhouse, C., 0Q

Nagasaki, F., 1L

Nakajima, Y., 02

Nakamura, D., 0X, 1L

Nakao, S., 0X

Narazaki, Aiko, 0I

Negel, J.-P., 12

Neuenschwander, B., 0U, 16

Ni, Jielei, 0G

Niino, Hiroyuki, 0I

Ohfuchi, Takafumi, 1A

Okada, T., 0X, 1L

Omatsu, Takashige, 06

Onuseit, V., 12

Philipose, U., 1K

Piredda, Giovanni, 1J

Poole, Z., 1K

Qi, Xiaoding, 19

Qiao, Lingling, 0G

Račiukaitis, Gediminas, 03, 0S, 14

Richardson, Martin C., 0B

Sakakura, Masaaki, 13, 1A

Sato, Tadatake, 0I

Sato, Yuji, 0V

Schwarz, Elisabeth, 1J

Shah, Lawrence, 0B

Shimogaki, T., 0X, 1L

Shimotsuma, Yasuhiko, 13, 1A

Silva, M., 14

Sima, Felix, 0F

Sincore, Alex M., 0B

Stiff-Roberts, Adrienne D., 07

Sugioka, Koji, 0F, 0G

Takahashi, Kenjiro, 0V

Takao, S., 0X

Takiya, Toshio, 1A

Tanaka, T., 1L

Terakawa, M., 02

Tetz, Thomas, 0B

Tsai, Mu-Gong, 19

Tsukamoto, Masahiro, 0V

Uedan, Hirohisa, 1C

Uno, Kazuyuki, 1E

Voisiat, Bogdan, 03, 14

Weber, R., 12

Weng, Chun-Hung, 1F

Wiedenmann, M., 12

Wu, Dong, 0F

Xu, Jian, 0F

Yamada, Yuya, 1A

Yamakawa, Takeshi, 1C

Yamamoto, Takuya, 1E

Yamashita, Kensuke, 0V

Yoshimura, Kouhei, 13

Zhang, H., 1K

Zimmermann, M., 16

Žukauskas, Airidas, 03

Conference Committee

Symposium Chairs

Symposium Co-chairs

Program Track Chairs

Conference Chairs

Conference Program Committee

Session Chairs

Introduction

The period from 1984-1994 had seen significantly increased research and development of laser techniques for ablation of solid targets and deposition/epitaxy of thin films. These advancements were, to a large extent, driven by the emerging technology of high-temperature superconducting thin films and the development of highly efficient methods for the fabrication of multicomponent materials enabled by the pulsed laser deposition technique. That period was followed by a significant expansion of laser-based technologies into applications less traditional than those known by the automotive and heavy industries (laser cutting, welding, drilling), such as micro- and non-scale laser machining, and post-processing of solid materials fabricated with conventional techniques.

SPIE Photonics West debuted in San Jose, California, in 1995, and sponsored the first meeting in a series of laser applications for materials processing addressing the growing field of micro- and nano-scale research focused on Laser-Induced Thin Film Processing [edited by J. J. Dubowski, Proceedings of SPIE Vol. 2403, (SPIE, Bellingham, WA, 1995)]. The following year, a new meeting on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) was organized at Photonics West in San Jose [see Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, edited by J. J. Dubowski, J. Mazumder, L. R. Migliore, C. Roychoudhuri, R. D. Schaeffer, Proceedings of SPIE Vol. 2703, (SPIE, Bellingham WA, 1996)], which was the beginning of the LAMOM series. Some of the areas of interest listed in the Call for Papers of that meeting included laser vapor deposition and laser ablation. However, LAMOM-I also defined such areas of interest as nanostructures and nanomaterials for microelectronics, laser-driven surface modification, and process modeling for quantitative description of process parameters. The increasing role of a laser in advancing the field of micromachining and nanotechnology was observed over the next 20 years. The femtosecond laser played an important contribution to these advancements, as highlighted in Dr. Koji Sugioka’s presentation in LAMOM-XX's anniversary session.

Figure 1

first call for papers for LAMOM conference in 1996

Numerous challenges and opportunities lay ahead for the laser-driven microelectronic and optoelectronic platforms before they could offer attractive solutions, not only in the conventional areas of applications — such as telecommunications or the consumer market — but also in areas such as life sciences, environmental monitoring, or energy. These solutions will become increasingly available as we advance our understanding of the laser-matter interaction, develop advanced methods of controlling the output of a laser, and as we explore thermodynamics of systems far from equilibrium. This theme resonated in another LAMOM-XX anniversary presentation given by Dr. Henry Helvajian.

We are still at the beginning stages of discovering the laser as a tool to fabricate new materials and to provide engineering solutions at nanoscale. For example, 3D printing could be understood not only as a mechanical approach to fabricate micro- or nano-scale objects, but also as a technology of nano-scale manipulation that would provide interlinks required to make fully functional bio-imprinted 3D microstructures.

We wish to thank all the co-chairs, session chairs, program committee members, and colleagues who have helped organize the LAMOM series and who also went a step further, creating “spin-off” conferences which address the exciting field of lasers as tools for exploration and fabrication of otherwise unattainable material architectures. Our special thanks go to the SPIE management for harboring LAMOM and providing a stimulating atmosphere at Photonics West.