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15 March 2015 Front Matter: Volume 9350
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This PDF file contains the front matter associated with SPIE Proceedings Volume 9350 including the Title Page, Copyright information, Table of Contents, Introduction, and Conference Committee listing.

The papers included in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. The papers published in these proceedings reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon.

Please use the following format to cite material from this book:

Author(s), “Title of Paper,” in Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, edited by Stephan Roth, Yoshiki Nakata, Beat Neuenschwander, Xianfan Xu, Proceedings of SPIE Vol. 9350 (SPIE, Bellingham, WA, 2015) Article CID Number.

ISSN: 0277-786X

ISBN: 9781628414400

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Paper Numbering: Proceedings of SPIE follow an e-First publication model, with papers published first online and then in print. Papers are published as they are submitted and meet publication criteria. A unique citation identifier (CID) number is assigned to each article at the time of the first publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online, print, and electronic versions of the publication. SPIE uses a six-digit CID article numbering system in which:

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  • The last two digits indicate publication order within the volume using a Base 36 numbering system employing both numerals and letters. These two-number sets start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B … 0Z, followed by 10-1Z, 20-2Z, etc.

The CID Number appears on each page of the manuscript. The complete citation is used on the first page, and an abbreviated version on subsequent pages.

Authors

Numbers in the index correspond to the last two digits of the six-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first four digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B…0Z, followed by 10-1Z, 20-2Z, etc.

Abdou Ahmed, M., 12

Abdulfattah, Ali, 0B

Ahmed, Farid, 0C

Akitsu, Tetsuya, 1E

Bellouard, Yves, 0G

Berger, Sascha, 0B

Bodea, Marius, 1J

Breunig, H. G., 18

Chen, Chia-Chuan, 19

Chen, In-Gann, 19

Chen, K., 1K

Chen, Kuan-Ming, 1F

Chen, You-jyun, 19

Cheng, Chung-Wei, 19

Cheng, Ya, 0G

Chung, Ming-Han, 1F

Domke, Matthias, 1J

Ducros, N., 14

Egle, Bernadette, 1J

Fasching, Gernot, 1J

Freitag, C., 12

Fukuda, Naoaki, 13, 1A

Gaponov, D., 14

Ge, Wangyao, 07

Gečys, P., 0S, 14

George, D., 1K

Graf, T., 12

Harada, K., 0X

Hideur, A., 14

Higashihata, M., 0X, 1L

Hosokawa, Yoichiroh, 1C

Huang, Jung-Chun, 19

Huang, Min, 0G

Iino, Takanori, 1C

Ikenoue, H., 1L

Indrišiūnas, Simonas, 03

Jaeggi, B., 0U, 16

Jitsuno, Takahisa, 1E

Jun, Martin B. G., 0C

Kapnopoulos, C., 0Q

Karnakis, D. M., 0Q

Kearsley, A. J., 0Q

König, K., 18

Kramer, Th., 0U

Kurita, Torataro, 13

Kurosaki, Ryozo, 0I

Laskarakis, A., 0Q

Lauer, B., 0U

Lavoute, L., 14

Lee, Chih-Kung, 1F

Leinenbach, F., 18

Liao, Yang, 0G

Lin, Cen-Ying, 19

Lin, Y., 1K

Logothetidis, S., 0Q

Löscher, A., 12

Lowell, D., 1K

Lutkenhaus, J., 1K

Markauskas, E., 0S

Maruyama, Akihiro, 1C

Masuno, Shinichiro, 0V

Matsuoka, Fumihiro, 0V

McCormick, Ryan D., 07

Mekeridis, E. 0Q

Midorikawa, Katsumi, 0F

Mingareev, Ilya, 0B

Miura, Kiyotaka, 13, 1A

Moorhouse, C., 0Q

Nagasaki, F., 1L

Nakajima, Y., 02

Nakamura, D., 0X, 1L

Nakao, S., 0X

Narazaki, Aiko, 0I

Negel, J.-P., 12

Neuenschwander, B., 0U, 16

Ni, Jielei, 0G

Niino, Hiroyuki, 0I

Ohfuchi, Takafumi, 1A

Okada, T., 0X, 1L

Omatsu, Takashige, 06

Onuseit, V., 12

Philipose, U., 1K

Piredda, Giovanni, 1J

Poole, Z., 1K

Qi, Xiaoding, 19

Qiao, Lingling, 0G

Račiukaitis, Gediminas, 03, 0S, 14

Richardson, Martin C., 0B

Sakakura, Masaaki, 13, 1A

Sato, Tadatake, 0I

Sato, Yuji, 0V

Schwarz, Elisabeth, 1J

Shah, Lawrence, 0B

Shimogaki, T., 0X, 1L

Shimotsuma, Yasuhiko, 13, 1A

Silva, M., 14

Sima, Felix, 0F

Sincore, Alex M., 0B

Stiff-Roberts, Adrienne D., 07

Sugioka, Koji, 0F, 0G

Takahashi, Kenjiro, 0V

Takao, S., 0X

Takiya, Toshio, 1A

Tanaka, T., 1L

Terakawa, M., 02

Tetz, Thomas, 0B

Tsai, Mu-Gong, 19

Tsukamoto, Masahiro, 0V

Uedan, Hirohisa, 1C

Uno, Kazuyuki, 1E

Voisiat, Bogdan, 03, 14

Weber, R., 12

Weng, Chun-Hung, 1F

Wiedenmann, M., 12

Wu, Dong, 0F

Xu, Jian, 0F

Yamada, Yuya, 1A

Yamakawa, Takeshi, 1C

Yamamoto, Takuya, 1E

Yamashita, Kensuke, 0V

Yoshimura, Kouhei, 13

Zhang, H., 1K

Zimmermann, M., 16

Žukauskas, Airidas, 03

Conference Committee

Symposium Chairs

  • Guido Hennig, Daetwyler Graphics AG (Switzerland)

  • Yongfeng Lu, University of Nebraska-Lincoln (United States)

Symposium Co-chairs

  • Bo Gu, Bos Photonics (United States)

  • Andreas Tünnermann, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany) and Friedrich-Schiller-Universtät Jena (Germany)

Program Track Chairs

  • Henry Helvajian, The Aerospace Corporation (United States)

  • Alberto Piqué, U.S. Naval Research Laboratory (United States)

Conference Chairs

  • Stephan Roth, BLZ Bayerisches Laserzentrum GmbH (Germany)

  • Yoshiki Nakata, Osaka University (Japan)

  • Beat Neuenschwander, Berner Fachhochschule Technik und Informatik (Switzerland)

  • Xianfan Xu, Purdue University (United States)

Conference Program Committee

  • Craig B. Arnold, Princeton University (United States)

  • J. Thomas Dickinson, Washington State University (United States)

  • Jan J. Dubowski, Université de Sherbrooke (Canada)

  • Bo Gu, Bos Photonics (United States)

  • Sami T. Hendow, Adaptive Laser Processing (United States)

  • Guido Hennig, Daetwyler Graphics AG (Switzerland)

  • Henry Helvajian, The Aerospace Corporation (United States)

  • Michel Meunier, École Polytechnique de Montréal (Canada)

  • Hiroyuki Niino, National Institute of Advanced Industrial Science and Technology (Japan)

  • Alberto Piqué, U.S. Naval Research Laboratory (United States)

  • Gediminas Raciukaitis, Center for Physical Sciences and Technology (Lithuania)

  • Andrei V. Rode, The Australian National University (Australia)

  • Klaus Sokolowski-Tinten, Universität Duisburg-Essen (Germany)

  • Razvan Stoian, Laboratoire Hubert Curien (France)

  • Koji Sugioka, RIKEN (Japan)

Session Chairs

  • 1 Pulsed Laser Deposition and Synthesis of Nano-scale Structures: Joint Session with Conference 9352

    Andrei V. Kabashin, Lasers, Plasmas et Procédés Photoniques (France)

    Richard F. Haglund Jr., Vanderbilt University (United States)

  • 2 Laser-induced Surface Nanostructures: Joint Session with Conference 9352

    Yoshiki Nakata, Osaka University (Japan)

    Xianfan Xu, Purdue University (United States)

  • 3 Laser Nanoscale Materials Processing

    Gediminas Raciukaitis, Center for Physical Sciences and Technology (Lithuania)

  • 4 Laser Direct Write

    Stephan Roth, BLZ Bayerisches Laserzentrum GmbH (Germany)

  • 5 Laser Micromachining in Bulk and Thin Film Materials: Joint Session with Conference 9355

    Bo Gu, Bos Photonics (United States)

  • 6 Laser Micromachining of Glass: Joint Session with Conference 9355

    Sami T. Hendow, Adaptive Laser Processing (United States)

  • 7 Processes Compatible for LIFT and Additive Manufacturing I: Joint Session with Conference 9353

    Stephan Roth, BLZ Bayerisches Laserzentrum GmbH (Germany)

    Henry Helvajian, The Aerospace Corporation (United States)

  • 8 Processes Compatible for LIFT and Additive Manufacturing II: Joint Session with Conference 9353

    Beat Neuenschwander, Berner Fachhochschule Technik und Informatik (Switzerland)

    Henry Helvajian, The Aerospace Corporation (United States)

  • 9 20 Years of LAMOM: Anniversary Session

    Jan J. Dubowski, Université de Sherbrooke (Canada)

    Stephan Roth, BLZ Bayerisches Laserzentrum GmbH (Germany)

  • 10 Processing of Photovoltaics

    Yoshiki Nakata, Osaka University (Japan)

  • 11 Dynamics of Laser Ablation

    Gediminas Raciukaitis, Center for Physical Sciences and Technology (Lithuania)

  • 12 Thin-film Processing

    Andrei V. Rode, The Australian National University (Australia)

  • 13 Ultrafast Laser Micromachining

    Beat Neuenschwander, Berner Fachhochschule Technik und Informatik (Switzerland)

  • 14 Systems for High-precision Manufacturing

    Stephan Roth, BLZ Bayerisches Laserzentrum GmbH (Germany)

Introduction

The period from 1984-1994 had seen significantly increased research and development of laser techniques for ablation of solid targets and deposition/epitaxy of thin films. These advancements were, to a large extent, driven by the emerging technology of high-temperature superconducting thin films and the development of highly efficient methods for the fabrication of multicomponent materials enabled by the pulsed laser deposition technique. That period was followed by a significant expansion of laser-based technologies into applications less traditional than those known by the automotive and heavy industries (laser cutting, welding, drilling), such as micro- and non-scale laser machining, and post-processing of solid materials fabricated with conventional techniques.

SPIE Photonics West debuted in San Jose, California, in 1995, and sponsored the first meeting in a series of laser applications for materials processing addressing the growing field of micro- and nano-scale research focused on Laser-Induced Thin Film Processing [edited by J. J. Dubowski, Proceedings of SPIE Vol. 2403, (SPIE, Bellingham, WA, 1995)]. The following year, a new meeting on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) was organized at Photonics West in San Jose [see Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, edited by J. J. Dubowski, J. Mazumder, L. R. Migliore, C. Roychoudhuri, R. D. Schaeffer, Proceedings of SPIE Vol. 2703, (SPIE, Bellingham WA, 1996)], which was the beginning of the LAMOM series. Some of the areas of interest listed in the Call for Papers of that meeting included laser vapor deposition and laser ablation. However, LAMOM-I also defined such areas of interest as nanostructures and nanomaterials for microelectronics, laser-driven surface modification, and process modeling for quantitative description of process parameters. The increasing role of a laser in advancing the field of micromachining and nanotechnology was observed over the next 20 years. The femtosecond laser played an important contribution to these advancements, as highlighted in Dr. Koji Sugioka’s presentation in LAMOM-XX's anniversary session.

Figure 1

first call for papers for LAMOM conference in 1996

00001_psisdg9350_935001_page_13_1.jpg

Numerous challenges and opportunities lay ahead for the laser-driven microelectronic and optoelectronic platforms before they could offer attractive solutions, not only in the conventional areas of applications — such as telecommunications or the consumer market — but also in areas such as life sciences, environmental monitoring, or energy. These solutions will become increasingly available as we advance our understanding of the laser-matter interaction, develop advanced methods of controlling the output of a laser, and as we explore thermodynamics of systems far from equilibrium. This theme resonated in another LAMOM-XX anniversary presentation given by Dr. Henry Helvajian.

We are still at the beginning stages of discovering the laser as a tool to fabricate new materials and to provide engineering solutions at nanoscale. For example, 3D printing could be understood not only as a mechanical approach to fabricate micro- or nano-scale objects, but also as a technology of nano-scale manipulation that would provide interlinks required to make fully functional bio-imprinted 3D microstructures.

We wish to thank all the co-chairs, session chairs, program committee members, and colleagues who have helped organize the LAMOM series and who also went a step further, creating “spin-off” conferences which address the exciting field of lasers as tools for exploration and fabrication of otherwise unattainable material architectures. Our special thanks go to the SPIE management for harboring LAMOM and providing a stimulating atmosphere at Photonics West.

© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
"Front Matter: Volume 9350", Proc. SPIE 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, 935001 (15 March 2015); https://doi.org/10.1117/12.2191398
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