Burst mode with ps- and fs-pulses: Influence on the removal rate, surface quality, and heat accumulation

B. Neuenschwander; Thorsten Kramer; B. Lauer; B. Jaeggi

doi:10.1117/12.2076455

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4 March 2015 Burst mode with ps- and fs-pulses: Influence on the removal rate, surface quality, and heat accumulation

B. Neuenschwander, Thorsten Kramer, B. Lauer, B. Jaeggi

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Proceedings Volume 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX; 93500U (2015) https://doi.org/10.1117/12.2076455
Event: SPIE LASE, 2015, San Francisco, California, United States

Abstract

The burst mode for ps and fs pulses for steel and copper is investigated. It is found that the reduction of the energy in a single pulse (in the burst) represents the main factor for the often reported gain in the removal rate using the burst mode e.g. for steel no investigated burst sequence lead to a higher removal rate compared to single pulses at higher repetition rate. But for copper a situation was found where the burst mode leads to a real increase of the removal rate in the range of 20%. Further the burst mode offers the possibility to generate slightly melted flat surfaces with good optical properties in the case of steel. Temperature simulations indicate that the surface state during the burst mode could be responsible for the melting effect or the formation of cavities in clusters which reduces the surface quality.

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B. Neuenschwander, Thorsten Kramer, B. Lauer, and B. Jaeggi "Burst mode with ps- and fs-pulses: Influence on the removal rate, surface quality, and heat accumulation", Proc. SPIE 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, 93500U (4 March 2015); https://doi.org/10.1117/12.2076455

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