4 March 2015 Improvements in ultra-high precision surface structuring using synchronized galvo or polygon scanner with a laser system in MOPA arrangement
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Abstract
In earlier work the capabilities of synchronizing a galvo scanner or a polygon line scanner with a picosecond laser system in MOPA arrangement were presented. However these systems only enabled precise positioning of laser pulses on the target relatively to each other. Since then a novel approach to increase the absolute precision in positioning has been developed. This improvement enables new and more efficient process strategies such as bidirectional processing or high precision structuring of large areas in combination with additional mechanical axes. These improvements represent a major step towards large scale industrial applications in laser based micromachining.
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M. Zimmermann, B. Jaeggi, B. Neuenschwander, "Improvements in ultra-high precision surface structuring using synchronized galvo or polygon scanner with a laser system in MOPA arrangement", Proc. SPIE 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, 935016 (4 March 2015); doi: 10.1117/12.2076724; https://doi.org/10.1117/12.2076724
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