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4 March 2015 Glass drilling by longitudinally excited CO2 laser with short laser pulse
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We developed a longitudinally excited CO2 laser that produces a short laser pulse. The laser was very simple and consisted of a 45-cm-long alumina ceramic pipe with an inner diameter of 9 mm, a pulse power supply, a step-up transformer, a storage capacitance, and a spark-gap switch. The laser pulse had a spike pulse and a pulse tail. The energy of the pulse tail was controlled by adjusting medium gas. Using three types of CO2 laser pulse with the same spike-pulse energy and the different pulse-tail energy, the characteristics of the hole drilling of synthetic silica glass was investigated. Higher pulse-tail energy gave deeper ablation depth. In the short laser pulse with the spike-pulse energy of 1.2 mJ, the spike pulse width of 162 ns, the pulse-tail energy of 24.6 mJ, and the pulse-tail length of 29.6 μs, 1000 shots irradiation produced the ablation depth of 988 μm. In the hole drilling of synthetic silica glass by the CO2 laser, a crack-free process was realized.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kazuyuki Uno, Takuya Yamamoto, Tetsuya Akitsu, and Takahisa Jitsuno "Glass drilling by longitudinally excited CO2 laser with short laser pulse", Proc. SPIE 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, 93501E (4 March 2015);


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