Metal mirrors with metal-dielectric HR-coating for ultrashort laser pulses applied in scanner applications

M. Schürmann; S. Risse; H. Kämmer; C. Franke; R. Schlegel; S. Müller; C. Damm; R. Steinkopf; F. Dreisow; S. Nolte; R. Eberhardt; N. Kaiser

doi:10.1117/12.2079487

12 March 2015 Metal mirrors with metal-dielectric HR-coating for ultrashort laser pulses applied in scanner applications

M. Schürmann, S. Risse, H. Kämmer, C. Franke, R. Schlegel, S. Müller, C. Damm, R. Steinkopf, F. Dreisow, S. Nolte, R. Eberhardt, N. Kaiser

Author Affiliations +

Proceedings Volume 9351, Laser-based Micro- and Nanoprocessing IX; 93510S (2015) https://doi.org/10.1117/12.2079487
Event: SPIE LASE, 2015, San Francisco, California, United States

Abstract

Metal mirrors are an attractive solution for scan mirrors working with ultra-short pulse lasers. Small mechanical inertia and a small mirror mass are required. Therefore, the mirrors have to be very stiff and a high quality optical surface has to be provided. This can be achieved with lightweight AlSi based mirrors with diamond-turned NiP polishable plating.

Different coating options were evaluated in order to provide the necessary high reflectivity and a satisfactory laser damage threshold for ultrashort laser pulses in the few ps to fs regime at λ = 1030 nm. High-reflective metal layers enhanced by dielectric HfO₂/SiO₂ stacks were found to be the most advantageous coating option due to their comparatively small thickness and measured damage thresholds above 1 J/cm²@8ps.

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M. Schürmann, S. Risse, H. Kämmer, C. Franke, R. Schlegel, S. Müller, C. Damm, R. Steinkopf, F. Dreisow, S. Nolte, R. Eberhardt, and N. Kaiser "Metal mirrors with metal-dielectric HR-coating for ultrashort laser pulses applied in scanner applications", Proc. SPIE 9351, Laser-based Micro- and Nanoprocessing IX, 93510S (12 March 2015); https://doi.org/10.1117/12.2079487

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