Paper
16 March 2015 Two-photon polymerization of hybrid polymers for applications in micro-optics
Sönke Steenhusen, Frank Burmeister, Hans-Christoph Eckstein, Ruth Houbertz
Author Affiliations +
Proceedings Volume 9353, Laser 3D Manufacturing II; 93530K (2015) https://doi.org/10.1117/12.2079277
Event: SPIE LASE, 2015, San Francisco, California, United States
Abstract
Miniaturization and higher integration of opto-electronic components require highly sophisticated optical designs. This creates the demand for freeform technologies like Two-Photon Polymerization (2PP) and new specially adapted materials like hybrid polymers (ORMOCERRs). Recent progress in the fabrication of microoptical structures using 2PP and specially designed hybrid polymers is presented. Among the structures are freeform and aberration-optimized microlenses and multilevel diffractive optical elements. These components are discussed with respect to fabrication process and their resulting optical performance. Furthermore, 2PP-initiated refractive index modification, offering high potential for energy-efficient fabrication of 3D optical interconnects, is discussed.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sönke Steenhusen, Frank Burmeister, Hans-Christoph Eckstein, and Ruth Houbertz "Two-photon polymerization of hybrid polymers for applications in micro-optics", Proc. SPIE 9353, Laser 3D Manufacturing II, 93530K (16 March 2015); https://doi.org/10.1117/12.2079277
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Cited by 4 scholarly publications.
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KEYWORDS
Two photon polymerization

Waveguides

Diffractive optical elements

Microlens

Polymers

Refractive index

Optical lithography

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