Paper
13 March 2015 Ammonothermal growth of polar and non-polar bulk GaN crystal
Yutaka Mikawa, Takayuki Ishinabe, Shinichiro Kawabata, Tae Mochizuki, Atsuhiko Kojima, Yuji Kagamitani, Hideo Fujisawa
Author Affiliations +
Proceedings Volume 9363, Gallium Nitride Materials and Devices X; 936302 (2015) https://doi.org/10.1117/12.2078137
Event: SPIE OPTO, 2015, San Francisco, California, United States
Abstract
SCAATTM has been developed as a novel ammonothermal method which enables to obtain strain free, high quality and large size bulk gallium nitride (GaN) crystals under high pressure and high temperature super-critical ammonia. One of the unique features of this technique is relatively high growth rate of more than a few hundred micrometers per day toward polar and non-polar axis with excellent crystalline quality. The morphology, X-ray rocking curve, etch pit density and electric properties are presented.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yutaka Mikawa, Takayuki Ishinabe, Shinichiro Kawabata, Tae Mochizuki, Atsuhiko Kojima, Yuji Kagamitani, and Hideo Fujisawa "Ammonothermal growth of polar and non-polar bulk GaN crystal", Proc. SPIE 9363, Gallium Nitride Materials and Devices X, 936302 (13 March 2015); https://doi.org/10.1117/12.2078137
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Cited by 29 scholarly publications and 3 patents.
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KEYWORDS
Gallium nitride

Crystals

X-rays

Etching

Semiconducting wafers

Quartz

Crystallography

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