Low-loss delay lines with small footprint on a micron-scale SOI platform

Matteo Cherchi; Mikko Harjanne; Konstantinos Vyrsokinos; Sami Ylinen; Markku Kapulainen; Tapani Vehmas; Timo Aalto

doi:10.1117/12.2079560

27 February 2015 Low-loss delay lines with small footprint on a micron-scale SOI platform

Matteo Cherchi, Mikko Harjanne, Konstantinos Vyrsokinos, Sami Ylinen, Markku Kapulainen, Tapani Vehmas, Timo Aalto

Proceedings Volume 9367, Silicon Photonics X; 93670A (2015) https://doi.org/10.1117/12.2079560
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

Long and yet compact spiral waveguides based on micron-scale silicon strip waveguides has been enabled very recently by the introduction of the Euler bends. By ensuring effective broadband single mode operation of otherwise highly multimodal waveguides, these bends can have very low losses (<0.01 dB/90°) even with effective radii of a few microns. Together with the low propagation losses (< 0.15 dB/cm) of micron-scale strip waveguides, these bends enable centimeter-long delay lines with negligible losses and very small foot-print (< 1 mm2). In particular, interferometers delayed by ≈ 1 cm long spirals on one of the two arms have been fabricated on SOI wafers with both 3 um- and 4 umthick silicon layer, based on the well assessed process developed by VTT. The full devices have footprint smaller than 1.5 mm², and they have been measured to have extinction ratios < 15 dB (reaching up to 21 dB) and about 3 dB excess losses. Functional characterization of the delayed interferometers at about 10 Gbps through demodulation of pseudorandom Differential Phase Shift Keying signals led to clearly opened eye diagrams with Q factor of 8.6 and bit error rates lower than 10^-15.

Citation Download Citation

Matteo Cherchi, Mikko Harjanne, Konstantinos Vyrsokinos, Sami Ylinen, Markku Kapulainen, Tapani Vehmas, and Timo Aalto "Low-loss delay lines with small footprint on a micron-scale SOI platform", Proc. SPIE 9367, Silicon Photonics X, 93670A (27 February 2015); https://doi.org/10.1117/12.2079560

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available