27 February 2015 Silicon-PDMS optofluidic integration
Author Affiliations +
Proceedings Volume 9367, Silicon Photonics X; 936718 (2015) https://doi.org/10.1117/12.2080859
Event: SPIE OPTO, 2015, San Francisco, California, United States
In this work we show that integrated Hybrid Silicon-PDMS Antiresonant Reflecting Optical Waveguide (H-ARROW) can be applied for the realization of optofluidic devices. H-ARROW is constituted by the optofluidic channel of a conventional ARROW, sealed with a thin PDMS layer. This layout simplifies the integration of microfluidic parts to manipulate liquid samples, which can be easily fabricated in the PDMS layer. Hybrid ARROWs have been fabricated and used in order to design complex devices like an integrated hybrid liquid core optofluidic ring resonator (h-LCORR) and a hybrid optofluidic platform for fluorescence measurements.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Genni Testa, Genni Testa, Gianluca Persichetti, Gianluca Persichetti, Pasqualina M. Sarro, Pasqualina M. Sarro, Romeo Bernini, Romeo Bernini, "Silicon-PDMS optofluidic integration", Proc. SPIE 9367, Silicon Photonics X, 936718 (27 February 2015); doi: 10.1117/12.2080859; https://doi.org/10.1117/12.2080859


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