27 February 2015 High-quality slot waveguide ring resonator based on atomic layer deposition
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Proceedings Volume 9367, Silicon Photonics X; 93671J (2015) https://doi.org/10.1117/12.2076903
Event: SPIE OPTO, 2015, San Francisco, California, United States
Slot waveguide based ring resonators filled with atomic layer deposited (ALD) aluminum oxide (Al2O3) were fabricated and characterized. Our results demonstrate that ALD can be used to create slot waveguide ring resonators with relatively high Q-factors, which opens new possibilities for various photonic applications, such as optical sensing and all-optical signal processing.
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A. Autere, A. Autere, L. Karvonen, L. Karvonen, A. Säynätjoki, A. Säynätjoki, M. Roussey, M. Roussey, E. Färm, E. Färm, M. Kemell, M. Kemell, X. Tu, X. Tu, T. Y. Liow, T. Y. Liow, G. Q. Lo, G. Q. Lo, M. Ritala, M. Ritala, M. Leskelä, M. Leskelä, S. Honkanen, S. Honkanen, Z. Sun, Z. Sun, "High-quality slot waveguide ring resonator based on atomic layer deposition", Proc. SPIE 9367, Silicon Photonics X, 93671J (27 February 2015); doi: 10.1117/12.2076903; https://doi.org/10.1117/12.2076903

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