27 February 2015 Parameter-tolerant design of high contrast gratings
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Proceedings Volume 9372, High Contrast Metastructures IV; 93720N (2015) https://doi.org/10.1117/12.2081595
Event: SPIE OPTO, 2015, San Francisco, California, United States
Abstract
This work is devoted to the design of high contrast grating mirrors taking into account the technological constraints and tolerance of fabrication. First, a global optimization algorithm has been combined to a numerical analysis of grating structures (RCWA) to automatically design HCG mirrors. Then, the tolerances of the grating dimensions have been precisely studied to develop a robust optimization algorithm with which high contrast gratings, exhibiting not only a high efficiency but also large tolerance values, could be designed. Finally, several structures integrating previously designed HCGs has been simulated to validate and illustrate the interest of such gratings.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christyves Chevallier, Christyves Chevallier, Nicolas Fressengeas, Nicolas Fressengeas, Joël Jacquet, Joël Jacquet, Guilhem Almuneau, Guilhem Almuneau, Youness Laaroussi, Youness Laaroussi, Olivier Gauthier-Lafaye, Olivier Gauthier-Lafaye, Laurent Cerutti, Laurent Cerutti, Frédéric Genty, Frédéric Genty, } "Parameter-tolerant design of high contrast gratings", Proc. SPIE 9372, High Contrast Metastructures IV, 93720N (27 February 2015); doi: 10.1117/12.2081595; https://doi.org/10.1117/12.2081595
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