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27 February 2015Parameter-tolerant design of high contrast gratings
This work is devoted to the design of high contrast grating mirrors taking into account the technological constraints and tolerance of fabrication. First, a global optimization algorithm has been combined to a numerical analysis of grating structures (RCWA) to automatically design HCG mirrors. Then, the tolerances of the grating dimensions have been precisely studied to develop a robust optimization algorithm with which high contrast gratings, exhibiting not only a high efficiency but also large tolerance values, could be designed. Finally, several structures integrating previously designed HCGs has been simulated to validate and illustrate the interest of such gratings.
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Christyves Chevallier, Nicolas Fressengeas, Joël Jacquet, Guilhem Almuneau, Youness Laaroussi, Olivier Gauthier-Lafaye, Laurent Cerutti, Frédéric Genty, "Parameter-tolerant design of high contrast gratings," Proc. SPIE 9372, High Contrast Metastructures IV, 93720N (27 February 2015);