27 February 2015 Efficient high NA flat micro-lenses realized using high contrast transmitarrays
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Proceedings Volume 9372, High Contrast Metastructures IV; 93720P (2015) https://doi.org/10.1117/12.2079509
Event: SPIE OPTO, 2015, San Francisco, California, United States
We present design, fabrication, and characterization results of high numerical aperture (NA) micro-lenses based on a high contrast transmitarray platform. The high contrast transmitarray is created by periodic arrangement of amorphous silicon posts with different diameters on a fused silica substrate. We report near infrared high NA micro-lenses with spot sizes as small as 0.57λ and focusing efficiencies in excess of 80%. We demonstrate a trade-off relation between NA and efficiency of high contrast array flat micro-lenses, and attribute it to the spatial discretization of their phase profiles.
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Amir Arbabi, Amir Arbabi, Yu Horie, Yu Horie, Alexander J. Ball, Alexander J. Ball, Mahmood Bagheri, Mahmood Bagheri, Andrei Faraon, Andrei Faraon, } "Efficient high NA flat micro-lenses realized using high contrast transmitarrays", Proc. SPIE 9372, High Contrast Metastructures IV, 93720P (27 February 2015); doi: 10.1117/12.2079509; https://doi.org/10.1117/12.2079509

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