27 February 2015 Guided resonance reflective phase shifters
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Proceedings Volume 9372, High Contrast Metastructures IV; 93720W (2015) https://doi.org/10.1117/12.2077744
Event: SPIE OPTO, 2015, San Francisco, California, United States
Abstract
We present reflective phase shifters based on high contrast gratings resting on a low-index spacer backed by a metallic mirror. The guided resonance of the grating combined with the reflection from the metallic mirror leads to an all-pass filter with 2π phase shift variation and unity reflectivity across the resonance. We present simulations, fabrication and measurement of passive devices fabricated in silicon over gold using a polymer as the spacer layer. Active control at high modulation speeds can be achieved by shifting the guided resonance wavelength using carrier injection or thermo-optic effect in silicon.
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Yu Horie, Amir Arbabi, Andrei Faraon, "Guided resonance reflective phase shifters", Proc. SPIE 9372, High Contrast Metastructures IV, 93720W (27 February 2015); doi: 10.1117/12.2077744; https://doi.org/10.1117/12.2077744
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