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13 March 2015 Parallel fabrication of wafer-scale plasmonic metamaterials for nano-optics
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Abstract
We describe how physical vapor deposition coupled with micelle-nanolithography-seeded substrates permits the growth of metamaterials with 3D structural and material control at the nanoscale. Novel plasmonic hybrid structures with tuned optical response from the UV to the near IR are demonstrated.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Eslami, J. G. Gibbs, A G. Mark, Tung Chun Lee, H.- H. Jeong, I. Kim, and Peer Fischer "Parallel fabrication of wafer-scale plasmonic metamaterials for nano-optics", Proc. SPIE 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII, 93740R (13 March 2015); https://doi.org/10.1117/12.2080098
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