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17 April 2015 Process optimization for a 3D optical coupler and waveguide fabrication on a single substrate using buffer coat material
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Abstract
We have developed a hybrid lithography process necessary to fabricate a vertical optical coupler and an array of waveguide structures using the same buffer coat material on a single substrate. A virtual vernier scale built into the process enables precise alignment of both structures.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chris Summitt, Sunglin Wang, Lee Johnson, Melissa Zaverton, Tao Ge, Tom Milster, and Yuzuru Takashima "Process optimization for a 3D optical coupler and waveguide fabrication on a single substrate using buffer coat material", Proc. SPIE 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII, 937415 (17 April 2015); https://doi.org/10.1117/12.2080425
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