Quantification of microscopic surface features of single point diamond turned optics with subsequent chemical polishing

Nelson Cardenas; Matthew Kyrish; Daniel Taylor; Margaret Fraelich; Oscar Lechuga; Richard Claytor; Nelson Claytor

doi:10.1117/12.2080228

17 April 2015 Quantification of microscopic surface features of single point diamond turned optics with subsequent chemical polishing

Nelson Cardenas, Matthew Kyrish, Daniel Taylor, Margaret Fraelich, Oscar Lechuga, Richard Claytor, Nelson Claytor

Author Affiliations +

Proceedings Volume 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII; 93741I (2015) https://doi.org/10.1117/12.2080228
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

Electro-Chemical Polishing is routinely used in the anodizing industry to achieve specular surface finishes of various metals products prior to anodizing. Electro-Chemical polishing functions by leveling the microscopic peaks and valleys of the substrate, thereby increasing specularity and reducing light scattering. The rate of attack is dependent of the physical characteristics (height, depth, and width) of the microscopic structures that constitute the surface finish. To prepare the sample, mechanical polishing such as buffing or grinding is typically required before etching. This type of mechanical polishing produces random microscopic structures at varying depths and widths, thus the electropolishing parameters are determined in an ad hoc basis. Alternatively, single point diamond turning offers excellent repeatability and highly specific control of substrate polishing parameters. While polishing, the diamond tool leaves behind an associated tool mark, which is related to the diamond tool geometry and machining parameters. Machine parameters such as tool cutting depth, speed and step over can be changed in situ, thus providing control of the spatial frequency of the microscopic structures characteristic of the surface topography of the substrate. By combining single point diamond turning with subsequent electro-chemical etching, ultra smooth polishing of both rotationally symmetric and free form mirrors and molds is possible. Additionally, machining parameters can be set to optimize post polishing for increased surface quality and reduced processing times. In this work, we present a study of substrate surface finish based on diamond turning tool mark spatial frequency with subsequent electro-chemical polishing.

Citation Download Citation

Nelson Cardenas, Matthew Kyrish, Daniel Taylor, Margaret Fraelich, Oscar Lechuga, Richard Claytor, and Nelson Claytor "Quantification of microscopic surface features of single point diamond turned optics with subsequent chemical polishing", Proc. SPIE 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII, 93741I (17 April 2015); https://doi.org/10.1117/12.2080228

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