25 March 2015 Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera
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Proceedings Volume 9375, MOEMS and Miniaturized Systems XIV; 937505 (2015) https://doi.org/10.1117/12.2076440
Event: SPIE OPTO, 2015, San Francisco, California, United States
Abstract
This paper presents a large aperture micro scanning mirror (MSM) array especially developed for the novel 3D-laser camera Fovea3D. This 3D-camera uses a pulsed ToF technique with 1MVoxel distance measuring rate and targets for a large measurement range of 30…100m and FOV of 120°x60° at video like frame rates. To guarantee a large reception aperture of ≥ 20mm, large FOV and 3200 Hz bi-directional scanning frequency at the same time, a hybrid assembled MSM array was developed consisting of 22 reception mirrors and a separate sending mirror. A hybrid assembly of frequency selected scanner elements and a driving in parametric resonance were chosen to enable a fully synchronized operation of all scanner elements. For position feedback piezo-resistive position sensors are integrated on each MEMS chip. The paper discusses details of the MEMS system integration including the synchronized operation of multiple scanning elements.
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Thilo Sandner, Claudia Baulig, Thomas Grasshoff, Michael Wildenhain, Markus Schwarzenberg, Hans-Georg Dahlmann, Stefan Schwarzer, "Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera", Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 937505 (25 March 2015); doi: 10.1117/12.2076440; https://doi.org/10.1117/12.2076440
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