25 March 2015 Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera
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Proceedings Volume 9375, MOEMS and Miniaturized Systems XIV; 937505 (2015) https://doi.org/10.1117/12.2076440
Event: SPIE OPTO, 2015, San Francisco, California, United States
This paper presents a large aperture micro scanning mirror (MSM) array especially developed for the novel 3D-laser camera Fovea3D. This 3D-camera uses a pulsed ToF technique with 1MVoxel distance measuring rate and targets for a large measurement range of 30…100m and FOV of 120°x60° at video like frame rates. To guarantee a large reception aperture of ≥ 20mm, large FOV and 3200 Hz bi-directional scanning frequency at the same time, a hybrid assembled MSM array was developed consisting of 22 reception mirrors and a separate sending mirror. A hybrid assembly of frequency selected scanner elements and a driving in parametric resonance were chosen to enable a fully synchronized operation of all scanner elements. For position feedback piezo-resistive position sensors are integrated on each MEMS chip. The paper discusses details of the MEMS system integration including the synchronized operation of multiple scanning elements.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thilo Sandner, Thilo Sandner, Claudia Baulig, Claudia Baulig, Thomas Grasshoff, Thomas Grasshoff, Michael Wildenhain, Michael Wildenhain, Markus Schwarzenberg, Markus Schwarzenberg, Hans-Georg Dahlmann, Hans-Georg Dahlmann, Stefan Schwarzer, Stefan Schwarzer, "Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera", Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 937505 (25 March 2015); doi: 10.1117/12.2076440; https://doi.org/10.1117/12.2076440


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