27 February 2015 Tuning mechanical resonant frequencies of nanoelectromechanical systems with light
Author Affiliations +
Proceedings Volume 9375, MOEMS and Miniaturized Systems XIV; 93750I (2015); doi: 10.1117/12.2081123
Event: SPIE OPTO, 2015, San Francisco, California, United States
Abstract
In this paper, mechanical resonant frequencies of a nanoelectromechanical systems (NEMS) device are tuned by light, in which optical spring effect plays a role. A NEMS spring mechanism with multi-degree of freedom (DOF) is adopted here. Double-coupled nanobeam photonic crystal cavities (PCCs) are utilized to pump the optical spring effect. One of the PCCs is fixed, while the other is driven by the NEMS mechanism. We investigate the shift of the mechanism’s firstorder in-plane translational (I1) resonance mode tuned by the incident laser wavelengths across the fourth-order even (TEe,4) and odd (TEo,4) modes of the coupled cavities. It shows a nonlinear relationship between the I1 mechanical frequency and the laser wavelength. We also investigate the frequency of the third-order torsional (T3) mode versus the wavelengths across the same cavity TEe,4 mode and it shows a weaker torsional optical spring effect.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Feng Tian, Guangya Zhou, Fook Siong Chau, Jie Deng, "Tuning mechanical resonant frequencies of nanoelectromechanical systems with light", Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750I (27 February 2015); doi: 10.1117/12.2081123; https://doi.org/10.1117/12.2081123
PROCEEDINGS
6 PAGES


SHARE
KEYWORDS
Nanoelectromechanical systems

Photonic crystals

Waveguides

Finite element methods

Electron beam lithography

Nanophotonics

Resonators

Back to Top