27 February 2015 Fiber-coupled Fabry-Pérot notch filter combining in-plane axis, high speed MEMS tunability and large etching depth
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Proceedings Volume 9375, MOEMS and Miniaturized Systems XIV; 93750U (2015) https://doi.org/10.1117/12.2078155
Event: SPIE OPTO, 2015, San Francisco, California, United States
Abstract
Notch filters based on fiber-coupled Fabry-Pérot cavity are formed by a reflector placed in close proximity to a dielectric-coated end of an optical fiber. This kind of optical filters is easy to tailor for a given application because the external mirror has less mechanical and optical constraints. In this paper we present a fiber-coupled Fabry-Pérot filter based on dielectric-coated optical fiber inserted into a fiber groove facing a metallized micromirror, where the latter is driven by a high-speed MEMS actuator. The microsystem is fabricated using Deep Reactive Ion Etching (DRIE) technology on SOI wafer. The optical axis is in-plane and the components are self-aligned. The DRIE etching depth is 150 μm; chosen for improving the out-of-plane stiffness of the actuator and increasing the micromirror optical throughput. The MEMS actuator type is closing-gap while its quality factor is improved by slotting the fixed plate. The actuator, therefore, achieves a travel distance larger than 800 nm and has a resonance frequency of 90 kHz. The notch filter exhibits a free spectral range up to 100 nm and a notch rejection ratio of 20 dB around a wavelength of 1300 nm. The presented device provides low cost wafer level production of the filter.
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Yasser M. Sabry, Yasser M. Sabry, Yomna M. Eltagoury, Yomna M. Eltagoury, Ahmed Shebl, Ahmed Shebl, Mostafa Soliman, Mostafa Soliman, Diaa Khalil, Diaa Khalil, } "Fiber-coupled Fabry-Pérot notch filter combining in-plane axis, high speed MEMS tunability and large etching depth", Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750U (27 February 2015); doi: 10.1117/12.2078155; https://doi.org/10.1117/12.2078155
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