27 February 2015 Optical metrology of AlN piezomachined ultrasonic transducer arrays and piezopumps
Author Affiliations +
Proceedings Volume 9375, MOEMS and Miniaturized Systems XIV; 937512 (2015) https://doi.org/10.1117/12.2080721
Event: SPIE OPTO, 2015, San Francisco, California, United States
Piezomachined ultrasonic transducer (PMUT) arrays are commonly found in applications in the field of ultrasonography and gesture recognition systems. Their application for bio and chemical sample preparation is another possibility, based on their beam steering and acoustic field manipulation capabilities. Post-fabrication non-destructive measurement of key device temporal and spatial parameters is required in order to adjust either simulation models or tune fabrication steps. In this work we report an optical testing setup for measuring the acoustic spectrum of PMUT devices and arrays, characterize maximum deflection of PMUTs and piezopumps and investigate the load effect of electrical contacts on the spatial and temporal oscillation behavior of these piezoelectric structures. Spatial parameters are evaluated with digital holography and temporal parameters with single point Doppler shift and frequency-shifted. We employ this testing setup to measure our own designed PMUT structures which were fabricated at IME-Singapore, evaluating the relative merits of the PMUT design parameters.
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Mateusz Mądzik, Mateusz Mądzik, Inas Taha, Inas Taha, Raquel Flores, Raquel Flores, Ricardo Janeiro, Ricardo Janeiro, Jaime Viegas, Jaime Viegas, } "Optical metrology of AlN piezomachined ultrasonic transducer arrays and piezopumps", Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 937512 (27 February 2015); doi: 10.1117/12.2080721; https://doi.org/10.1117/12.2080721

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