9 March 2015 Robust diffuser and roughness metrology tool for LED manufacturing
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We have built a novel oblique angle scatterometer designed and optimized for measurements of rough surfaces having a root mean square roughness value (RMS Roughness) on the order of 100 nm – 1000 nm or larger. The majority of existing techniques for measurement of such surfaces are slow, sensitive to vibration, provide short or no working distance, may result in generation of particles and have very small throughput.1 In this paper, we novel metrology addressing the above limitations.
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Wojtech J. Walecki, Wojtech J. Walecki, Peter Walecki, Peter Walecki, "Robust diffuser and roughness metrology tool for LED manufacturing", Proc. SPIE 9383, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XIX, 93830W (9 March 2015); doi: 10.1117/12.2075540; https://doi.org/10.1117/12.2075540

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