Photodiodes integration on a suspended ridge structure VOA using 2-step flip-chip bonding method

Seon Hoon Kim; Tae Un Kim; Hyun Chul Ki; Doo Gun Kim; Hwe Jong Kim; Jung Woon Lim; Dong Yeol Lee; Chul Hee Park

doi:10.1117/12.2080463

7 February 2015 Photodiodes integration on a suspended ridge structure VOA using 2-step flip-chip bonding method

Seon Hoon Kim, Tae Un Kim, Hyun Chul Ki, Doo Gun Kim, Hwe Jong Kim, Jung Woon Lim, Dong Yeol Lee, Chul Hee Park

Proceedings Volume 9389, Next-Generation Optical Communication: Components, Sub-Systems, and Systems IV; 93890S (2015) https://doi.org/10.1117/12.2080463
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

In this works, we have demonstrated a VOA integrated with mPDs, based on silica-on-silicon PLC and flip-chip bonding technologies. The suspended ridge structure was applied to reduce the power consumption. It achieves the attenuation of 30dB in open loop operation with the power consumption of below 30W. We have applied two-step flipchip bonding method using passive alignment to perform high density multi-chip integration on a VOA with eutectic AuSn solder bumps. The average bonding strength of the two-step flip-chip bonding method was about 90gf.

Citation Download Citation

Seon Hoon Kim, Tae Un Kim, Hyun Chul Ki, Doo Gun Kim, Hwe Jong Kim, Jung Woon Lim, Dong Yeol Lee, and Chul Hee Park "Photodiodes integration on a suspended ridge structure VOA using 2-step flip-chip bonding method", Proc. SPIE 9389, Next-Generation Optical Communication: Components, Sub-Systems, and Systems IV, 93890S (7 February 2015); https://doi.org/10.1117/12.2080463

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available