Author Affiliations +
Dung Quach,1 Valeriy V. Ginzburg,2 Mingqi Li,1 Janet Wu,1 Shih-wei Chang,1 Peter Trefonas III,1 Phillip D. Hustad,1 Dan B. Millward,3 Gurpreet S. Lugani,3 Scott L. Light3
1Dow Electronic Materials (United States)
2The Dow Chemical Co. (United States)
3Micron Technology, Inc. (United States)