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19 March 2015 Smart plastic functionalization by nanoimprint and injection molding
Maksim Zalkovskij, Lasse H. Thamdrup, Kristian Smistrup, Thomas Andén, Alicia C. Johansson, Niels Jørgen Mikkelsen, Morten Hannibal Madsen, Jørgen Garnæs, Tommy Tungelund Kristiansen, Mads Diemer, Michael Døssing, Daniel Minzari, Peter Torben Tang, Anders Kristensen, Rafael Taboryski, Søren Essendrop, Theodor Nielsen, Brian Bilenberg
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Proceedings Volume 9423, Alternative Lithographic Technologies VII; 94230T (2015) https://doi.org/10.1117/12.2085766
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States
Abstract
In this paper, we present a route for making smart functionalized plastic parts by injection molding with sub-micrometer surface structures. The method is based on combining planar processes well known and established within silicon micro and sub-micro fabrication with proven high resolution and high fidelity with truly freeform injection molding inserts. The link between the planar processes and the freeform shaped injection molding inserts is enabled by the use of nanoimprint with flexible molds for the pattern definition combined with unidirectional sputter etching for transferring the pattern. With this approach, we demonstrate the transfer of down to 140 nm wide holes on large areas with good structure fidelity on an injection molding steel insert. The durability of the sub-micrometer structures on the inserts have been investigated by running two production series of 102,000 and 73,000 injection molded parts, respectively, on two different inserts and inspecting the inserts before and after the production series and the molded parts during the production series.
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Maksim Zalkovskij, Maksim Zalkovskij, Lasse H. Thamdrup, Lasse H. Thamdrup, Kristian Smistrup, Kristian Smistrup, Thomas Andén, Thomas Andén, Alicia C. Johansson, Alicia C. Johansson, Niels Jørgen Mikkelsen, Niels Jørgen Mikkelsen, Morten Hannibal Madsen, Morten Hannibal Madsen, Jørgen Garnæs, Jørgen Garnæs, Tommy Tungelund Kristiansen, Tommy Tungelund Kristiansen, Mads Diemer, Mads Diemer, Michael Døssing, Michael Døssing, Daniel Minzari, Daniel Minzari, Peter Torben Tang, Peter Torben Tang, Anders Kristensen, Anders Kristensen, Rafael Taboryski, Rafael Taboryski, Søren Essendrop, Søren Essendrop, Theodor Nielsen, Theodor Nielsen, Brian Bilenberg, Brian Bilenberg, "Smart plastic functionalization by nanoimprint and injection molding", Proc. SPIE 9423, Alternative Lithographic Technologies VII, 94230T (19 March 2015); doi: 10.1117/12.2085766; https://doi.org/10.1117/12.2085766
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