Ready for multi-beam exposure at 5kV on MAPPER tool: lithographic and process integration performances of advanced resists/stack

Isabelle Servin; Ndeye Arame Thiam; Patricia Pimenta-Barros; Marie-Line Pourteau; Armel-Petit Mebiene; Julien Jussot; Jonathan Pradelles; Philippe Essomba; Ludovic Lattard; Pieter Brandt; Marco Wieland

doi:10.1117/12.2085915

19 March 2015 Ready for multi-beam exposure at 5kV on MAPPER tool: lithographic and process integration performances of advanced resists/stack

Isabelle Servin, Ndeye Arame Thiam, Patricia Pimenta-Barros, Marie-Line Pourteau, Armel-Petit Mebiene, Julien Jussot, Jonathan Pradelles, Philippe Essomba, Ludovic Lattard, Pieter Brandt, Marco Wieland

Author Affiliations +

Proceedings Volume 9423, Alternative Lithographic Technologies VII; 94231C (2015) https://doi.org/10.1117/12.2085915
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

Maskless electron beam lithography is an attractive solution to address sub-90 nm technology nodes with high throughput and manufacturing costs reduction. One of the key challenges is to meet entirely process/integration specifications in terms of resolution, resist sensitivity, roughness and etch transfer into underlayers. In this paper, we evaluate and identify the optimal stack to fit printing performance using e-beam exposures and etch transfer patterning. Besides imaging performance, other key parameters such as outgassing and charge dissipation due to high current density are also considered to fully achieve targets for the machine developed by MAPPER Lithography.

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Isabelle Servin, Ndeye Arame Thiam, Patricia Pimenta-Barros, Marie-Line Pourteau, Armel-Petit Mebiene, Julien Jussot, Jonathan Pradelles, Philippe Essomba, Ludovic Lattard, Pieter Brandt, and Marco Wieland "Ready for multi-beam exposure at 5kV on MAPPER tool: lithographic and process integration performances of advanced resists/stack", Proc. SPIE 9423, Alternative Lithographic Technologies VII, 94231C (19 March 2015); https://doi.org/10.1117/12.2085915

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