19 March 2015 Electric-field assisted assembly of core-shell nanoparticle arrays for contact hole patterning
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Abstract
In this paper, we investigate an electric-field assisted assembly approach to create dense arrays of contact hole patterns with complex feature geometries. This hybrid strategy uses a spatially varying dielectrophoretic (DEP) force created by lithographically defined guiding features to assemble dense arrays of nanoparticles within the features, thereby replicating features within the starting pattern. For close-packed particle arrays, the half- and full-pitch of the contact hole array is defined by the starting nanoparticle core and shell diameter.
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Lan Lin, Lan Lin, Xuexue Guo, Xuexue Guo, Theresa S. Mayer, Theresa S. Mayer, "Electric-field assisted assembly of core-shell nanoparticle arrays for contact hole patterning", Proc. SPIE 9423, Alternative Lithographic Technologies VII, 94231U (19 March 2015); doi: 10.1117/12.2087547; https://doi.org/10.1117/12.2087547
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