Creation of guiding patterns for directed self-assembly of block copolymers by resistless direct e-beam exposure

Laura Evangelio; Marta Fernández-Regúlez; Xavier Borrisé; Matteo Lorenzoni; Jordi Fraxedas; Francesc Pérez-Murano

doi:10.1117/12.2085830

27 March 2015 Creation of guiding patterns for directed self-assembly of block copolymers by resistless direct e-beam exposure

Laura Evangelio, Marta Fernández-Regúlez, Xavier Borrisé, Matteo Lorenzoni, Jordi Fraxedas, Francesc Pérez-Murano

Author Affiliations +

Proceedings Volume 9423, Alternative Lithographic Technologies VII; 942326 (2015) https://doi.org/10.1117/12.2085830
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

We present a novel approach for the creation of guiding patterns to direct the self-assembly of block copolymers. A neutral layer of a brush polymer is directly exposed by electrons, causing the cross-linking of the brush molecules, and thus changing its local affinity. The advantage relies on the achievable resolution and the reduction of the process steps in comparison with deep UV and conventional electron beam lithography, since it avoids the use of a resist. We envision that this method will be highly valuable for the investigation of novel high-chi DSA materials and complex guiding pattern designs, where pattern placement and resolution is becoming critical.

Citation Download Citation

Laura Evangelio, Marta Fernández-Regúlez, Xavier Borrisé, Matteo Lorenzoni, Jordi Fraxedas, and Francesc Pérez-Murano "Creation of guiding patterns for directed self-assembly of block copolymers by resistless direct e-beam exposure", Proc. SPIE 9423, Alternative Lithographic Technologies VII, 942326 (27 March 2015); https://doi.org/10.1117/12.2085830

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