Finally, we conclude that both imaging overlay technology and DBO-1 technology are fully successful and have a valid roadmap for the next few design nodes, with some use cases better suited for one or the other measurement technologies. Having both imaging and DBO technology options available in parallel, allows Overlay Engineers a mix and match overlay measurement strategy, providing back up when encountering difficulties with one of the technologies and benefiting from the best of both technologies for every use case.
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Simon C. C. Hsu, Yuan Chi Pai, Charlie Chen, Chun Chi Yu, Henry Hsing, Hsing-Chien Wu, Kelly T. L. Kuo, Nuriel Amir, "Scatterometry or imaging overlay: a comparative study," Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 942409 (19 March 2015);