19 March 2015 Hp-finite element method for simulating light scattering from complex 3D structures
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Abstract
Methods for solving Maxwell’s equations are integral part of optical metrology and computational lithography setups. Applications require accurate geometrical resolution, high numerical accuracy and/or low computation times. We present a finite-element based electromagnetic field solver relying on unstructured 3D meshes and adaptive hp-refinement. We apply the method for simulating light scattering off arrays of high aspect-ratio nano-posts and FinFETs.
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Sven Burger, Sven Burger, Lin Zschiedrich, Lin Zschiedrich, Jan Pomplun, Jan Pomplun, Sven Herrmann, Sven Herrmann, Frank Schmidt, Frank Schmidt, } "Hp-finite element method for simulating light scattering from complex 3D structures", Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94240Z (19 March 2015); doi: 10.1117/12.2085795; https://doi.org/10.1117/12.2085795
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