Hp-finite element method for simulating light scattering from complex 3D structures

Sven Burger; Lin Zschiedrich; Jan Pomplun; Sven Herrmann; Frank Schmidt

doi:10.1117/12.2085795

19 March 2015 Hp-finite element method for simulating light scattering from complex 3D structures

Sven Burger, Lin Zschiedrich, Jan Pomplun, Sven Herrmann, Frank Schmidt

Author Affiliations +

Proceedings Volume 9424, Metrology, Inspection, and Process Control for Microlithography XXIX; 94240Z (2015) https://doi.org/10.1117/12.2085795
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

Methods for solving Maxwell’s equations are integral part of optical metrology and computational lithography setups. Applications require accurate geometrical resolution, high numerical accuracy and/or low computation times. We present a finite-element based electromagnetic field solver relying on unstructured 3D meshes and adaptive hp-refinement. We apply the method for simulating light scattering off arrays of high aspect-ratio nano-posts and FinFETs.

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Sven Burger, Sven Burger, Lin Zschiedrich, Lin Zschiedrich, Jan Pomplun, Jan Pomplun, Sven Herrmann, Sven Herrmann, Frank Schmidt, Frank Schmidt, "Hp-finite element method for simulating light scattering from complex 3D structures", Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94240Z (19 March 2015); doi: 10.1117/12.2085795; https://doi.org/10.1117/12.2085795

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