19 March 2015 Mechanical and thermal properties of nanomaterials at sub-50nm dimensions characterized using coherent EUV beams
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Abstract
Coherent extreme ultraviolet beams from tabletop high harmonic generation offer several revolutionary capabilities for observing nanoscale systems on their intrinsic length and time scales. By launching and monitoring hypersonic acoustic waves in such systems, we characterize the mechanical properties of sub-10nm layers and find that the material densities remain close to their bulk values while their elastic properties are significantly modified. Moreover, within the same measurement, by following the heat dissipation dynamics from 30-750nm-wide nanowires, we uncover a new thermal transport regime in which closely-spaced nanoscale heat sources can surprisingly cool more efficiently than widelyspaced heat sources of the same size.
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Kathleen Hoogeboom-Pot, Kathleen Hoogeboom-Pot, Jorge Hernandez-Charpak, Jorge Hernandez-Charpak, Travis Frazer, Travis Frazer, Xiaokun Gu, Xiaokun Gu, Emrah Turgut, Emrah Turgut, Erik Anderson, Erik Anderson, Weilun Chao, Weilun Chao, Justin Shaw, Justin Shaw, Ronggui Yang, Ronggui Yang, Margaret Murnane, Margaret Murnane, Henry Kapteyn, Henry Kapteyn, Damiano Nardi, Damiano Nardi, } "Mechanical and thermal properties of nanomaterials at sub-50nm dimensions characterized using coherent EUV beams", Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 942417 (19 March 2015); doi: 10.1117/12.2085615; https://doi.org/10.1117/12.2085615
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