19 March 2015 Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings
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Grazing-Incidence Small Angle X-ray Scattering (GISAXS) offers the ability to probe large sample areas, providing three-dimensional structural information at high detail in a thin film geometry. In this study we exploit the application of GISAXS to structures formed at one step of the LiNe (Liu-Nealey) flow using chemical patterns for directed self-assembly of block copolymer films. Experiments conducted at the Argonne National Laboratory provided scattering patterns probing film characteristics at both parallel and normal directions to the surface. We demonstrate the application of new computational methods to construct models based on scattering measured. Such analysis allows for extraction of structural characteristics at unprecedented detail.
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Manolis Doxastakis, Manolis Doxastakis, Hyo Seon Suh, Hyo Seon Suh, Xuanxuan Chen, Xuanxuan Chen, Paulina A. Rincon Delgadillo, Paulina A. Rincon Delgadillo, Lingshu Wan, Lingshu Wan, Lance Williamson, Lance Williamson, Zhang Jiang, Zhang Jiang, Joseph Strzalka, Joseph Strzalka, Jin Wang, Jin Wang, Wei Chen, Wei Chen, Nicola Ferrier, Nicola Ferrier, Abelardo Ramirez-Hernandez, Abelardo Ramirez-Hernandez, Juan J. de Pablo, Juan J. de Pablo, Roel Gronheid, Roel Gronheid, Paul Nealey, Paul Nealey, "Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings", Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94241N (19 March 2015); doi: 10.1117/12.2085824; https://doi.org/10.1117/12.2085824

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