Analysis of the self-assembling and the defect annihilation processes in DSA using meso-scale simulation

Hiroshi Morita; Yuki Norizoe

doi:10.1117/12.2085650

20 March 2015 Analysis of the self-assembling and the defect annihilation processes in DSA using meso-scale simulation

Hiroshi Morita, Yuki Norizoe

Proceedings Volume 9425, Advances in Patterning Materials and Processes XXXII; 942510 (2015) https://doi.org/10.1117/12.2085650
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

Recently, directed self-assembly (DSA) method is focused on as a next generation lithography technique. We performed the DPD simulations to analyze the self-assembling process of block copolymer in DSA using OCTA (in detail, see http://octa.jp) system. Using DPD simulation, we can obtain the phase separated structures at each moment consisted by block copolymer chains. As those structures are consisted by polymer chains, an analysis can be done on those structures. In this paper, we study the dynamics of end particles in the defect annihilation process to understand the dynamics of self-assembling of block copolymer in DSA. From our analysis, the end particles moves in advance than the change of domain structure in the defect annihilation process.

Citation Download Citation

Hiroshi Morita and Yuki Norizoe "Analysis of the self-assembling and the defect annihilation processes in DSA using meso-scale simulation", Proc. SPIE 9425, Advances in Patterning Materials and Processes XXXII, 942510 (20 March 2015); https://doi.org/10.1117/12.2085650

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available