Kazunori Sakai, Kenji Mochida, Shinichi Nakamura, Tooru Kimura, Kazuhiro Yoshikawa, Naoki Man, Hirofumi Seiki, Masaaki Takeda, "Novel thin film analysis to investigate actual film formation," Proc. SPIE 9425, Advances in Patterning Materials and Processes XXXII, 942522 (20 March 2015);