Recent improvements in bandwidth control have been realized in the XLR platform with Cymer’s DynaPulseTM control technology. This reduction in bandwidth variation could translate in the further reduction of CD variation in device structures. The Authors will discuss the impact that these improvements in bandwidth control have on advanced lithography applications. This can translate to improved CD control and higher wafer yields. A simulation study investigates the impact of bandwidth on contrast sensitive device layers such as contacts and 1x metal layers. Furthermore, the Authors will discuss the impact on process window through pitch and the overlapping process window through pitch that has been investigated. These improvements will be further quantified by the analysis of statistical bandwidth variation and the impact on CD.
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Will Conley, Simon Hsieh, Paolo Alagna, Yaching Hou, Pedro Martinez, "Impact of bandwidth on contrast sensitive structures for low k1 lithography," Proc. SPIE 9426, Optical Microlithography XXVIII, 942607 (18 March 2015);